IdealPhotonics CaF2 has been utilized as an optical key material in microlithography for semiconductor production for many years. CaF2 is established as an industry standard material for excimer laser optics in projection and illumination optics. The unique optical properties of CaF2 enable a variety of advanced applications.
Picture
Name
Part NO./Stock NO.
Description
Transmission Range
Size
Lead Time
Price
Operation
Features
● High broadband transmittance from deep UV to IR (130nm to 8µm)
● Qualified resistance to high energy particles and radiation
● Available with up to 420mm diameter
Physical/Optical Characteristics
Transmission Range :
0.13 to 10 μm (Note: IR grade will have restricted performance outside IR range
Refractive Index :
1.39908 at 5 μm (1) (2)
Reflection Loss :
5.4% at 5 μm
Absorption Coefficient :
7.8 x 10-4 cm-1 @ 2.7 μm
Reststrahlen Peak :
35 μm
dn/dT :
-10.6 x 10-6/°C (3)
dn/dμ = 0 :
1.7 μm
Density :
3.18 g/cc
Melting Point :
1360°C
Thermal Conductivity :
9.71 W m-1 K-1 (4)
Thermal Expansion :
18.85 x 10-6/°C (5)(6)
Hardness :
Knoop 158.3 (100) with 500g indenter
Specific Heat Capacity :
854 J Kg-1 K-1
Dielectric Constant :
6.76 at 1MHz (7)
Youngs Modulus (E) :
75.8 GPa (7)
Shear Modulus (G) :
33.77 GPa (7)
Bulk Modulus (K) :
82.71 GPa (7)
Elastic Coefficients :
C11 = 164 C12 = 53 C44 = 33.7 (7)
Apparent Elastic Limit :
36.54 MPa
Poisson Ratio :
0.26
Solubility :
0.0017g/100g water at 20°C
Molecular Weight :
78.08
Class/Structure :
Cubic Fm3m (#225) Fluorite Structure. Cleaves on (111)
µm
No
µm
No
µm
No
0.149
1.5800
0.161
1.5490
0.195
1.5000
0.200
1.4950
0.222
1.4800
0.248
1.4680
0.266
1.4621
0.280
1.4584
0.300
1.454
0.337
1.4481
0.400
1.4419
0.486
1.4370
0.588
1.4339
0.656
1.4325
0.687
1.4320
0.728
1.4314
0.884
1.4298
1.014
1.4288
1.100
1.4283
1.250
1.4275
1.650
1.4256
1.900
1.4244
2.058
1.4236
2.450
1.4214
2.700
1.4199
2.800
1.4192
3.050
1.4175
3.400
1.4149
4.000
1.4096
4.400
1.4057
4.800
1.4014
5.000
1.3991
5.304
1.3952
5.893
1.3871
6.483
1.3782
7.072
1.3681
7.661
1.357
8.251
1.3444
8.840
1.3308
9.429
1.3161
❈ No = Ordinary Ray
Calcium fluoride (CaF2or fluorite) is grown by vacuum Stockbarger technique in diameters of up to about 250mm.
Crystal for infrared use is often grown using naturally mined fluorite to reduce costs. It will not have the best transmission in the UV and VUV and can have absorption bands at 300nm due to impurities.
For UV and VUV applications chemically prepared raw material is generally used. For Excimer applications, we use only the highest grade of specially selected material and crystal.
Example：
Application
Due to its superior optical quality and excellent transmittance in UV, VIS and IR spectral ranges, Hellma Materials CaF2 can be used in versatile applications:
